Nanofabrication: Principles, Capabilities and Limits

Cui, Zheng

Nanofabrication: Principles, Capabilities and Limits
  • 出版商: Springer
  • 出版日期: 2024-07-15
  • 售價: $5,530
  • 貴賓價: 9.5 折 $5,254
  • 語言: 英文
  • 頁數: 407
  • 裝訂: Hardcover - also called cloth, retail trade, or trade
  • ISBN: 3031625455
  • ISBN-13: 9783031625459

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商品描述

Nanofabrication: Principles, Capabilities, and Limits provides a practical guide to nanofabrication technologies and processes. It was first published in 2008 and is now in an updated third edition. The book introduces readers to the fundamentals and recent developments in nanofabrication techniques, with chapters covering optical lithography, electron beam lithography, and nanoimprinting lithography, as well as nanofabrication by focused ion beams, scanning tips, self-assembly, and nanoscale pattern transfer by etching and deposition. There is also a chapter describing various tricks that enable the fabrication of nanostructures that would otherwise be impossible using traditional methods. The unique feature of this book is that each technique introduced is not only about its capabilities but also its limits so that the readers are fully aware of the best options to choose from a toolbox of nanofabrication processes covered in the book.

商品描述(中文翻譯)

《奈米製造：原理、能力和限制》提供了一本關於奈米製造技術和過程的實用指南。該書首次出版於2008年，現已更新至第三版。本書介紹了讀者奈米製造技術的基礎知識和最新發展，其中包括光學微影術、電子束微影術、奈米壓印微影術，以及利用聚焦離子束、掃描探針、自組裝和蝕刻沉積進行奈米製造的方法。書中還有一章介紹了各種技巧，這些技巧使得使用傳統方法無法實現的奈米結構製造成為可能。本書的獨特之處在於，每種介紹的技術不僅關注其能力，還關注其限制，以便讀者充分了解在書中介紹的奈米製造過程工具箱中的最佳選擇。

作者簡介

Zheng Cui received his Ph.D. in China in 1988 and went to the UK in 1989 as a Visiting Fellow at the Microelectronics Research Center, Cambridge University. In 1993, he became a Senior Scientist and later a Principal Scientist at Central Microstructure Facility, Rutherford Appleton Laboratory, UK. In 2009, he returned to China to join the Suzhou Institute of Nanotech and Nanobionics, Chinese Academy of Sciences, where he set up the Printable Electronics Research Center. In 2020, he retired from the Institute but has been carrying on as an advisor. He is now more involved in the industrial application of nanofabrication with key roles in a number of startup companies.

作者簡介(中文翻譯)

鄭翠於1988年在中國獲得博士學位，並於1989年前往英國劍橋大學微電子研究中心擔任訪問學者。1993年，他成為英國拉瑟福阿普爾頓實驗室中央微結構設施的高級科學家，後來成為首席科學家。2009年，他回到中國加入中國科學院蘇州納米技術與納米生物學研究所，並建立了可印刷電子研究中心。2020年，他從該研究所退休，但仍擔任顧問職務。他現在更多地參與納米製造的工業應用，並在多家初創公司擔任重要角色。

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