Microstereolithography and Other Fabrication Techniques for 3D MEMS

The application of MEMS (micro-electro-mechanical systems) in such diverse fields as intelligent microsensors, data storage, biomedical engineering and wireless communication is booming. Focusing on microstereolithography, this timely work provides insight into state-of-the-art microfabrication techniques for 3D microstructures, microdevices and MEMS.

• A unique and accessible overview of micro-system manufacture using the latest semiconductor processing techniques
• Coverage of the developmental history of MEMS, micro-sensors, actuators and signal processing units.
• Insight to a range of microfabrication techniques from laser ablation to x-ray lithography, silicon micro-machining and micro-moulding.
• Describes the latest fabrication prototypes and applications, including thin-film transistors, antennas, wireless telemetry systems and transducers

Microelectronics engineers will profit form this detailed overview of current technologies. Material technologists and physicists working in industrial and academic research and development will also find this a valuable reference source.

Table of Contents

Preface.

Microelectromechanical Systems.

Fundamentals of Polymer Synthesis for MEMS.

Stereolithography (SL).

Microstereolithography Techniques I-Scanning Method.

Microstereolithography Techniques II-Projection Method.

Polymeric MEMS Architecture with Silicon, Metal, and Ceramics.

Combined Silicon and Polymeric Structures.

Micromolding.

Applications.

Appendix 1: Some Polymers for MEMS.

Appendix 2: An Example of CAD Model and NC Codes for Microstereolithography.

Index.